Diamond coating on semiconductor device components.
Plasma-resistant diamond
Diamond films possess exceptionally excellent properties in terms of hardness, chemical stability, and thermal conductivity. Therefore, they demonstrate very high durability even in plasma environments. By coating components of plasma etching equipment and deposition devices, especially the parts that are directly exposed to plasma, with diamond films, the lifespan of the components can be significantly extended. They show particular resistance to fluorine-based, chlorine-based, and hydrogen gases.
- Company：DIAM
- Price：Other
